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Si3N4 300kV [001] thickness = 5.2nm
収差補正電子顕微鏡で重要となる残存収差について、試料と観察目的に対してにその影響を確認し、許容量を見積もることができます。
Cs 1 mm -> 0
Cs vs df and C5, ( i.e. Scherzer focus, and +C5 )
2-fold astigmatism
4-fold astigmatism
Star and 6-fold astigmatism
Coma and 3-fold astigmatism
5-fold astigmatism, 3-lobe, 4th order coma
Hemoglobin 300kV
Achromatic line : (analytical calculation vs numerical calculation)
Spatial coherence reduced by the odd symmetric wave aberration
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